Halbleiter-Kolloquium
Datum: 16/05/2022
Ort: Online
Interner Bereich
für Cluster-Akteure
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Die Teilnahme ist kostenfrei und offen für alle Interessierten. Eine Voranmeldung ist nicht erforderlich.
Beginn: 17:15 Uhr
Am MS-TEAMS Meeting teilnehmen
Vertical GaN based electronic devices are raising more and more interest, but the related technology is still in infant state compared to the more established HEMT technology. This talk will briefly summarize the difficulties and point out the challenges associated with vertical GaN devices from a materials point of view. The YESvGaN project aims to establish a new class of vertical GaN power transistors which shall combine the performance benefits of vertical Wide Band Gap (WBG) transistors with the cost advantages of established silicon technology.
Vertical membrane power devices based on GaN-on-Si(111) are capable of achieving higher breakdown voltage and current density than their lateral counterpart. However, since several micrometers GaN epilayers are required and there is a large thermal and lattice mismatch with the substrate, wafer curvature becomes critical. To gain better control over the wafer curvature, a model is proposed that attempts to relate epitaxy to the resulting curvature during the growth of GaN on large Si substrates.
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